Title :
10 GHz narrow band SAW filters using diamond
Author :
Hachigo, A. ; Nakahata, H. ; Itakura, K. ; Fujii, Shohei ; Shikata, Shin-Ichi
Author_Institution :
Res. Labs., Sumitomo Electr. Ind. Ltd., Itami, Japan
Abstract :
Harmonic phenomena for the layered structures have been discussed and show several differences from those for bulk substrates. An equivalent circuit model for the harmonics including velocity dispersion has been presented and compared with experiments. SAW filters up to 10 GHz have been fabricated over one micron line width using the ZnO/diamond structure.
Keywords :
II-VI semiconductors; diamond; equivalent circuits; surface acoustic wave filters; zinc compounds; 10 GHz; C; ZnO-C; diamond; equivalent circuit; layered structures; narrow band SAW filters; velocity dispersion; Commercialization; Dispersion; Equivalent circuits; Frequency; Laboratories; Metallization; Narrowband; Power harmonic filters; SAW filters; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
Conference_Location :
Caesars Tahoe, NV
Print_ISBN :
0-7803-5722-1
DOI :
10.1109/ULTSYM.1999.849412
