DocumentCode :
2103180
Title :
Conductive copper patterning by nanotransfer printing
Author :
Felmet, Kimberly ; Sun, Yangming ; Loo, Yueh-Lin
Author_Institution :
Dept. of Chem. Eng., Texas Univ., Austin, TX, USA
fYear :
2004
fDate :
21-23 June 2004
Firstpage :
91
Abstract :
In this paper, we report a solventless, additive approach for patterning conductive copper in the 1-100 μm range at ambient conditions. A freshly-etched GaAs substrate is treated with 1,8-octanedithiol molecules, resulting in covalent bonds between the GaAs substrate and one of the thiol functionalities. A poly(dimethylsiloxane), PDMS, elastomeric stamp, freshly evaporated with Cu, is then brought into contact with the substrate. Intimate molecular contact between the raised regions of the stamp and the substrate facilitates the permanent attachment of Cu to the GaAs substrate via the formation of covalent bonds between the unreacted thiol endgroups of octanedithiol and Cu. Pattern transfer is completed upon stamp removal; this process occurs at ambient conditions with less than 30 seconds of contact time. Currently, this technique permits large-area patterning of features with sizes ranging from 1 μm to 500 μm.
Keywords :
bonds (chemical); copper; metallisation; nanopatterning; organic compounds; 1 to 500 micron; 1,8-octanedithiol; Cu-GaAs; PDMS; ambient conditions; conductive copper patterning; covalent bonds; elastomeric stamp; feature size; large-area patterning; molecular contact; nanotransfer printing; pattern transfer; poly(dimethylsiloxane); solventless additive patterning method; thiol functionalities; Chemical engineering; Copper; Gallium arsenide; Gold; Pattern analysis; Printing; Silicon; Sun; Surface contamination; Surface morphology;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Device Research Conference, 2004. 62nd DRC. Conference Digest [Includes 'Late News Papers' volume]
ISSN :
1548-3770
Print_ISBN :
0-7803-8284-6
Type :
conf
DOI :
10.1109/DRC.2004.1367798
Filename :
1367798
Link To Document :
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