DocumentCode :
2103840
Title :
A novel angular rate sensor employing flexural plate wave
Author :
Chang Seung Lee ; Kwangsoo No ; Dang Moon Wee ; Jong Hyun Lee ; Chang Auck Choi
Author_Institution :
Dept. of Mater. Sci. & Eng., Korea Adv. Inst. of Sci. & Technol., Seoul, South Korea
Volume :
1
fYear :
1999
fDate :
17-20 Oct. 1999
Firstpage :
493
Abstract :
We designed and fabricated the silicon micromachined flexural plate wave actuator based on piezoelectric PbZrxTi1-xO3 (PZT) thin films for use in angular rate sensor. The working principles of the angular rate sensor utilizing the wave were investigated.
Keywords :
Coriolis force; angular velocity measurement; gyroscopes; micromachining; micromechanical resonators; microsensors; piezoelectric actuators; ultrasonic delay lines; Coriolis force; PZT; PbZrO3TiO3; Si; US delay line; angular rate sensor; design; fabrication; freestanding membrane; micro-gyroscope; micromachined flexural plate wave actuator; piezoelectric thin films; Acoustic sensors; Actuators; Biomembranes; Capacitive sensors; Frequency; Materials science and technology; Semiconductor thin films; Sensor phenomena and characterization; Silicon; Thin film sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
Conference_Location :
Caesars Tahoe, NV
ISSN :
1051-0117
Print_ISBN :
0-7803-5722-1
Type :
conf
DOI :
10.1109/ULTSYM.1999.849447
Filename :
849447
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2103840
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