Title :
Elastic properties of GaAs obtained by inversion of laser-generated surface acoustic wave measurements
Author :
Flannery, C.M. ; Chilla, E. ; Semenov, Serguei ; Frohlich, H.-J.
Author_Institution :
Paul Drude Inst. for Solid State Electron., Berlin, Germany
Abstract :
The surface acoustic wave (SAW) velocity with respect to propagation angle on a crystal substrate is dependent on the elastic constants of the crystal. Measurement of the SAW velocity dispersion with angle gives us information about these constants but one needs to solve the inverse problem of SAW propagation in order to obtain the elastic constants (C11, C12, C44). In this work we investigate, both experimentally and theoretically, SAW velocity behaviour on (001), (111) and (311) GaAs. Several different acoustic modes can be measured on each surface. Using the measured velocity dispersion curves on each surface we derive elastic constants by inversion, and examine the potential of the inversion method to accurately derive elastic constant values for measurements on each cut. We find that, by combining multiple mode curves, this method allows measurement of elastic constants with high accuracy, particularly for the off-axis constant C12.
Keywords :
III-V semiconductors; elastic constants; elastic moduli measurement; gallium arsenide; inverse problems; photoacoustic effect; surface acoustic waves; ultrasonic materials testing; ultrasonic measurement; GaAs; SAW propagation; SAW velocity dispersion; acoustic modes; elastic constants; elastic properties; high accuracy; inverse problem; inversion method; laser-generated SAW measurements; laser-generated US waves; multiple mode curves; off-axis constant; propagation angle; Acoustic measurements; Acoustic propagation; Acoustic waves; Dispersion; Gallium arsenide; Inverse problems; Optical propagation; Particle measurements; Surface acoustic waves; Velocity measurement;
Conference_Titel :
Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
Conference_Location :
Caesars Tahoe, NV
Print_ISBN :
0-7803-5722-1
DOI :
10.1109/ULTSYM.1999.849449