Title :
SEM/SThM-hybrid-system: a new tool for advanced thermal analysis of electronic devices
Author :
Altes, A. ; Joachimsthaler, I. ; Zimmermann, G. ; Heiderhoff, R. ; Balk, L.J.
Author_Institution :
Lehrstuhl fur Elektron., Bergische Univ. Wuppertal, Germany
Abstract :
A resistive probe based Scanning Thermal Microscope (SThM) was implemented in an analysis chamber of a Scanning Electron Microscope (SEM). By means of this hybrid-system thermal device, specific characteristics are detectable. Variable punctual heat sources can be simulated and the influence of ambient parameters can be investigated.
Keywords :
failure analysis; scanning electron microscopes; thermal analysis; SEM/SThM hybrid system; electronic device; failure analysis; resistive probe; scanning electron microscope; scanning thermal microscope; thermal analysis; Bridge circuits; Failure analysis; Integrated circuit measurements; Platinum; Probes; Scanning electron microscopy; Temperature distribution; Thermal conductivity; Thermal resistance; Wire;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 2002. IPFA 2002. Proceedings of the 9th International Symposium on the
Print_ISBN :
0-7803-7416-9
DOI :
10.1109/IPFA.2002.1025657
