Title :
Enhanced Light Emission from Ge Quantum Dots in Microdisks
Author :
Xia, Jinsong ; Nemoto, Koudai ; Ikegami, Yuta ; Usami, Noritaka ; Shiraki, Yasuhiro
Author_Institution :
Musashi Inst. of Technol., Tokyo
Abstract :
Ge self-assembled quantum dots embedded into microdisk resonators are fabricated by a combination of gas-source molecular beam epitaxy, electron beam lithography and reactive ion etching. Scanning electron microscopy and microphotoluminescence are used to characterize the quantum dots. Room temperature mu-PL measurements show that the light emission from Ge dots is significantly enhanced by the microdisks.
Keywords :
chemical beam epitaxial growth; electron beam lithography; elemental semiconductors; germanium; photoluminescence; scanning electron microscopy; self-assembly; semiconductor growth; semiconductor quantum dots; sputter etching; Ge; electron beam lithography; gas-source molecular beam epitaxy; light emission; microdisk resonators; microphotoluminescence; reactive ion etching; scanning electron microscopy; self-assembled quantum dots; temperature 293 K to 298 K; Etching; Laser excitation; Optical pumping; Optical resonators; Plasma temperature; Pump lasers; Quantum dots; Resists; Silicon; Stimulated emission;
Conference_Titel :
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location :
Lake Buena Vista, FL
Print_ISBN :
978-1-4244-0925-9
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2007.4382581
