Design and fabrication of ultrasonic traveling wave bi-directional linear motors

This paper describes development of a new ultrasonic traveling wave motor of a quite simple structure that can move bi-directionally in both self moving and non-self moving modes. With the finite element method, we design and verify validity of the new structure, and determine its optimal structure and boundary conditions for proper generation of the traveling wave. Based on the results, a prototype of the motor is fabricated and characterized, which thereby proves practical applicability of the new structure.