Title :
Optical Modulation with Nanohole Gratings Made by Nanoimprint Lithography
Author :
Skinner, J.L. ; Talin, A.A. ; Horsley, D.A.
Author_Institution :
Univ. of California, Davis
Abstract :
A silver film perforated with an array of circular nanoholes fabricated by thermal nanoimprint lithography is brought in and out of contact with a quartz superstrate to yield a 60% amplitude modulation in reflectivity.
Keywords :
nanolithography; optical modulation; circular nanoholes; nanohole gratings; optical modulation; thermal nanoimprint lithography; Gratings; Micromechanical devices; Nanolithography; Optical films; Optical modulation; Optical sensors; Reflectivity; Resonance; Sea measurements; Silver;
Conference_Titel :
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location :
Lake Buena Vista, FL
Print_ISBN :
978-1-4244-0925-9
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2007.4382605
