DocumentCode
2105902
Title
A multi-step electromechanical /spl Sigma//spl Delta/ converter for micro-g capacitive accelerometers
Author
Kulah, H. ; Junseok Chae ; Yazdi, N. ; Najafi, K.
Author_Institution
Center for Wireless Integrated MicroSystenns, Michigan Univ., Ann Arbor, MI, USA
fYear
2003
fDate
13-13 Feb. 2003
Firstpage
202
Abstract
A multi-step electromechanical /spl Sigma//spl Delta/ modulator for /spl mu/g accelerometers is described. A two-element sensor array is used in two /spl Sigma//spl Delta/ loops and resolution improves by >2x compared to a conventional 2nd-order /spl Sigma//spl Delta/ modulator. This CMOS chip operates at 1 MHz and provides 0.2-1.2V/pF sensitivity, <20aF resolution, >120dB dynamic range, and dissipates <12mW.
Keywords
CMOS integrated circuits; accelerometers; capacitive sensors; microsensors; sigma-delta modulation; 1 MHz; 12 mW; CMOS chip; micro-g capacitive accelerometer; multi-step electromechanical sigma-delta converter; two-element sensor array; Accelerometers; Circuits; Digital modulation; Dynamic range; Electrodes; Electromechanical sensors; Feedback loop; Mathematical model; Sensor arrays; Sensor systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference, 2003. Digest of Technical Papers. ISSCC. 2003 IEEE International
Conference_Location
San Francisco, CA, USA
ISSN
0193-6530
Print_ISBN
0-7803-7707-9
Type
conf
DOI
10.1109/ISSCC.2003.1234267
Filename
1234267
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