Title :
A multi-step electromechanical /spl Sigma//spl Delta/ converter for micro-g capacitive accelerometers
Author :
Kulah, H. ; Junseok Chae ; Yazdi, N. ; Najafi, K.
Author_Institution :
Center for Wireless Integrated MicroSystenns, Michigan Univ., Ann Arbor, MI, USA
Abstract :
A multi-step electromechanical /spl Sigma//spl Delta/ modulator for /spl mu/g accelerometers is described. A two-element sensor array is used in two /spl Sigma//spl Delta/ loops and resolution improves by >2x compared to a conventional 2nd-order /spl Sigma//spl Delta/ modulator. This CMOS chip operates at 1 MHz and provides 0.2-1.2V/pF sensitivity, <20aF resolution, >120dB dynamic range, and dissipates <12mW.
Keywords :
CMOS integrated circuits; accelerometers; capacitive sensors; microsensors; sigma-delta modulation; 1 MHz; 12 mW; CMOS chip; micro-g capacitive accelerometer; multi-step electromechanical sigma-delta converter; two-element sensor array; Accelerometers; Circuits; Digital modulation; Dynamic range; Electrodes; Electromechanical sensors; Feedback loop; Mathematical model; Sensor arrays; Sensor systems;
Conference_Titel :
Solid-State Circuits Conference, 2003. Digest of Technical Papers. ISSCC. 2003 IEEE International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-7707-9
DOI :
10.1109/ISSCC.2003.1234267
