Novel Atomic Force Microscope Probes with Integrated Electrostatic Actuation and Optical Detection

Author

Degertekin, F. Levent

Author_Institution

Georgia Inst. of Technol., Atlanta

fYear

2007

fDate

21-25 Oct. 2007

Firstpage

832

Lastpage

833

Abstract

In this work, a new class of atomic force microscope (AFM) probe, called force-sensing integrated readout and active tip (FIRAT), is developed. It combines several micromechanical devices (MEMS) techniques, diffraction based optical sensing and electrostatic actuation, to improve the speed and sensitivity of AFM systems for imaging and force measurement applications both in air and in liquid media.

Keywords

atomic force microscopy; electrostatic actuators; force measurement; optical sensors; AFM sensitivity; FIRAT probe; MEMS techniques; air media; atomic force microscope probes; diffraction based optical sensing; force measurement applications; force-sensing integrated readout active tip; imaging applications; integrated electrostatic actuation; liquid media; micromechanical devices; optical detection; Atom optics; Atomic force microscopy; Atomic measurements; Electrostatic actuators; Integrated optics; Micromechanical devices; Optical detectors; Optical microscopy; Optical sensors; Probes;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE

Conference_Location

Lake Buena Vista, FL

ISSN

1092-8081

Print_ISBN

978-1-4244-0925-9

Electronic_ISBN

1092-8081

Type

conf

DOI

10.1109/LEOS.2007.4382666

Filename

4382666