Title :
Thermal-mechanical Detector Array with Integrated Diffraction Grating
Author :
Ferhanoglu, Onur ; Toy, M.F. ; Unal, G. ; Kalyoncu, H.
Abstract :
An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures. A diffraction grating is embedded on the pixel membrane for sensing sub-nm mechanical deflections. The first order reflected light was focused on a CCD camera to monitor the entire array. Results show that it is possible to achieve < 50mK NETD using a 12 bit CCD camera.
Keywords :
diffraction gratings; infrared imaging; micro-optics; microsensors; CCD camera; MEMS bimaterial structures; embedded diffraction grating; integrated diffraction grating; thermal-mechanical detector array; uncooled thermal detector array; Biomembranes; Charge coupled devices; Charge-coupled image sensors; Diffraction gratings; Infrared detectors; Leg; Optical buffering; Optical diffraction; Sensor arrays; Testing;
Conference_Titel :
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location :
Lake Buena Vista, FL
Print_ISBN :
978-1-4244-0925-9
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2007.4382668
