• DocumentCode
    2106637
  • Title

    Thermal-mechanical Detector Array with Integrated Diffraction Grating

  • Author

    Ferhanoglu, Onur ; Toy, M.F. ; Unal, G. ; Kalyoncu, H.

  • fYear
    2007
  • fDate
    21-25 Oct. 2007
  • Firstpage
    836
  • Lastpage
    837
  • Abstract
    An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures. A diffraction grating is embedded on the pixel membrane for sensing sub-nm mechanical deflections. The first order reflected light was focused on a CCD camera to monitor the entire array. Results show that it is possible to achieve < 50mK NETD using a 12 bit CCD camera.
  • Keywords
    diffraction gratings; infrared imaging; micro-optics; microsensors; CCD camera; MEMS bimaterial structures; embedded diffraction grating; integrated diffraction grating; thermal-mechanical detector array; uncooled thermal detector array; Biomembranes; Charge coupled devices; Charge-coupled image sensors; Diffraction gratings; Infrared detectors; Leg; Optical buffering; Optical diffraction; Sensor arrays; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
  • Conference_Location
    Lake Buena Vista, FL
  • ISSN
    1092-8081
  • Print_ISBN
    978-1-4244-0925-9
  • Electronic_ISBN
    1092-8081
  • Type

    conf

  • DOI
    10.1109/LEOS.2007.4382668
  • Filename
    4382668
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2106637