Behavioral modeling of microelectromechanical filters

Author

Fouladi, Siamak ; Kahrizi, M.

Author_Institution

Dept. of Electr. & Comput. Eng., Concordia Univ., Montreal, Que., Canada

fYear

2005

fDate

24-26 Aug. 2005

Firstpage

419

Lastpage

424

Abstract

The current system on chip (SOC) designs containing microelectromechanical systems (MEMS) require the combination of the analog and digital signal processing circuitry besides the non-electrical components and to verify the whole system performance, the MEMS devices should be integrated in a mixed-domain simulator, for this reason appropriate system level modeling and simulation techniques are required. In this paper we present the application of lumped element equivalent networks and reduced order modeling (ROM) in behavioral modeling of band-pass filters based on MEMS resonators.

Keywords

band-pass filters; digital signal processing chips; micromechanical resonators; reduced order systems; system-on-chip; MEMS device; MEMS resonator; SOC; analog signal processing circuitry; band-pass filter; behavioral modeling; digital signal processing circuitry; lumped element equivalent network; microelectromechanical filter; microelectromechanical system; mixed-domain simulator; nonelectrical component; reduced order modeling; system on chip; Circuit simulation; Digital signal processing chips; Filters; Microelectromechanical devices; Microelectromechanical systems; Micromechanical devices; Read only memory; Signal design; System performance; System-on-a-chip;

fLanguage

English

Publisher

ieee

Conference_Titel

Physics and Control, 2005. Proceedings. 2005 International Conference

Print_ISBN

0-7803-9235-3

Type

conf

DOI

10.1109/PHYCON.2005.1514019

Filename

1514019