Behavioral modeling of microelectromechanical filters

The current system on chip (SOC) designs containing microelectromechanical systems (MEMS) require the combination of the analog and digital signal processing circuitry besides the non-electrical components and to verify the whole system performance, the MEMS devices should be integrated in a mixed-domain simulator, for this reason appropriate system level modeling and simulation techniques are required. In this paper we present the application of lumped element equivalent networks and reduced order modeling (ROM) in behavioral modeling of band-pass filters based on MEMS resonators.