• DocumentCode
    2107649
  • Title

    Dynamic Modeling of Magnetic Film Actuators

  • Author

    Isikman, Serhan O. ; Urey, Hakan

  • Author_Institution
    Koc Univ., Istanbul
  • fYear
    2007
  • fDate
    21-25 Oct. 2007
  • Firstpage
    912
  • Lastpage
    913
  • Abstract
    Dynamic behavior of magnetic film based actuators is modeled and the model is validated with experiments. An external electro-coil is used to actuate the cantilever scanners, which has an electroplated 30 mum thick permalloy layer. Resonant vibration of the actuator is modeled accurately without constraining the external field to be uniform or the ferromagnetic material to be saturated.
  • Keywords
    Permalloy; electromagnetic actuators; ferromagnetic materials; magnetic thin films; vibrations; cantilever scanners; dynamic modeling; external electro-coil; ferromagnetic material; magnetic film actuators; permalloy layer; resonant vibration; size 30 mum; Actuators; Equations; Magnetic films; Magnetic materials; Magnetic resonance; Magnetostatics; Mirrors; Saturation magnetization; Soft magnetic materials; Torque; dynamic; magnetic actuators; permalloy; scanners; vibration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
  • Conference_Location
    Lake Buena Vista, FL
  • ISSN
    1092-8081
  • Print_ISBN
    978-1-4244-0925-9
  • Electronic_ISBN
    1092-8081
  • Type

    conf

  • DOI
    10.1109/LEOS.2007.4382706
  • Filename
    4382706