DocumentCode
2107649
Title
Dynamic Modeling of Magnetic Film Actuators
Author
Isikman, Serhan O. ; Urey, Hakan
Author_Institution
Koc Univ., Istanbul
fYear
2007
fDate
21-25 Oct. 2007
Firstpage
912
Lastpage
913
Abstract
Dynamic behavior of magnetic film based actuators is modeled and the model is validated with experiments. An external electro-coil is used to actuate the cantilever scanners, which has an electroplated 30 mum thick permalloy layer. Resonant vibration of the actuator is modeled accurately without constraining the external field to be uniform or the ferromagnetic material to be saturated.
Keywords
Permalloy; electromagnetic actuators; ferromagnetic materials; magnetic thin films; vibrations; cantilever scanners; dynamic modeling; external electro-coil; ferromagnetic material; magnetic film actuators; permalloy layer; resonant vibration; size 30 mum; Actuators; Equations; Magnetic films; Magnetic materials; Magnetic resonance; Magnetostatics; Mirrors; Saturation magnetization; Soft magnetic materials; Torque; dynamic; magnetic actuators; permalloy; scanners; vibration;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location
Lake Buena Vista, FL
ISSN
1092-8081
Print_ISBN
978-1-4244-0925-9
Electronic_ISBN
1092-8081
Type
conf
DOI
10.1109/LEOS.2007.4382706
Filename
4382706
Link To Document