Title :
Dynamic Modeling of Magnetic Film Actuators
Author :
Isikman, Serhan O. ; Urey, Hakan
Author_Institution :
Koc Univ., Istanbul
Abstract :
Dynamic behavior of magnetic film based actuators is modeled and the model is validated with experiments. An external electro-coil is used to actuate the cantilever scanners, which has an electroplated 30 mum thick permalloy layer. Resonant vibration of the actuator is modeled accurately without constraining the external field to be uniform or the ferromagnetic material to be saturated.
Keywords :
Permalloy; electromagnetic actuators; ferromagnetic materials; magnetic thin films; vibrations; cantilever scanners; dynamic modeling; external electro-coil; ferromagnetic material; magnetic film actuators; permalloy layer; resonant vibration; size 30 mum; Actuators; Equations; Magnetic films; Magnetic materials; Magnetic resonance; Magnetostatics; Mirrors; Saturation magnetization; Soft magnetic materials; Torque; dynamic; magnetic actuators; permalloy; scanners; vibration;
Conference_Titel :
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location :
Lake Buena Vista, FL
Print_ISBN :
978-1-4244-0925-9
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2007.4382706
