DocumentCode
2107654
Title
Topolithography and its application to the manufacture of 3D diode-based memories
Author
Shepard, D.R.
Author_Institution
Nup2, North Hampton, NH, USA
fYear
2003
fDate
13-13 Feb. 2003
Firstpage
368
Abstract
Topolithography is a process wherein all of the information necessary to define a circuit is applied to a substrate in a single step. A multilevel surface topology defines the circuit for subsequent self-assembly so no photolithographic steps are required to manufacture a circuit resulting in substantially reduced costs. A transistor-less memory circuit is designed where high density storage, address decoding and I/O are implemented using an array of diodes.
Keywords
integrated memory circuits; lithography; read-only storage; self-assembly; semiconductor diodes; surface topography; 3D diode-based memories; I/O; address decoding; circuit definition; high density storage; multilevel surface topology; self-assembly; single step process; substrate; topolithography; transistor-less memory circuit; Circuits; Decoding; Dielectrics; Lithography; Manufacturing; Material storage; Power distribution; Semiconductor diodes; Substrates; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference, 2003. Digest of Technical Papers. ISSCC. 2003 IEEE International
Conference_Location
San Francisco, CA, USA
ISSN
0193-6530
Print_ISBN
0-7803-7707-9
Type
conf
DOI
10.1109/ISSCC.2003.1234338
Filename
1234338
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