• DocumentCode
    2107654
  • Title

    Topolithography and its application to the manufacture of 3D diode-based memories

  • Author

    Shepard, D.R.

  • Author_Institution
    Nup2, North Hampton, NH, USA
  • fYear
    2003
  • fDate
    13-13 Feb. 2003
  • Firstpage
    368
  • Abstract
    Topolithography is a process wherein all of the information necessary to define a circuit is applied to a substrate in a single step. A multilevel surface topology defines the circuit for subsequent self-assembly so no photolithographic steps are required to manufacture a circuit resulting in substantially reduced costs. A transistor-less memory circuit is designed where high density storage, address decoding and I/O are implemented using an array of diodes.
  • Keywords
    integrated memory circuits; lithography; read-only storage; self-assembly; semiconductor diodes; surface topography; 3D diode-based memories; I/O; address decoding; circuit definition; high density storage; multilevel surface topology; self-assembly; single step process; substrate; topolithography; transistor-less memory circuit; Circuits; Decoding; Dielectrics; Lithography; Manufacturing; Material storage; Power distribution; Semiconductor diodes; Substrates; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference, 2003. Digest of Technical Papers. ISSCC. 2003 IEEE International
  • Conference_Location
    San Francisco, CA, USA
  • ISSN
    0193-6530
  • Print_ISBN
    0-7803-7707-9
  • Type

    conf

  • DOI
    10.1109/ISSCC.2003.1234338
  • Filename
    1234338