• DocumentCode
    2107669
  • Title

    Carbon nanotube field effect transistors - fabrication, device physics, and circuit implications

  • Author

    Wong, H.-S.P. ; Appenzeller, J. ; Derycke, V. ; Martel, R. ; Wind, S. ; Avouris, P.

  • Author_Institution
    IBM Res., IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
  • fYear
    2003
  • fDate
    13-13 Feb. 2003
  • Firstpage
    370
  • Abstract
    The device and circuit implications of carbon nanotube field effect transistors (CNFET) as a logic technology are assessed. The salient device characteristics and fabrication techniques are described based on measured device parameters. The device/circuit performance of CNFET are estimated and the key technical challenges to developing the CNFET as a logic technology are discussed.
  • Keywords
    carbon nanotubes; field effect logic circuits; field effect transistors; nanotube devices; C; carbon nanotube field effect transistors; circuit implications; device implications; device physics; fabrication techniques; logic technology; CNTFETs; Carbon nanotubes; Circuits; Contact resistance; Current measurement; Dielectrics; FETs; Fabrication; Physics; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference, 2003. Digest of Technical Papers. ISSCC. 2003 IEEE International
  • Conference_Location
    San Francisco, CA, USA
  • ISSN
    0193-6530
  • Print_ISBN
    0-7803-7707-9
  • Type

    conf

  • DOI
    10.1109/ISSCC.2003.1234339
  • Filename
    1234339