DocumentCode
2107669
Title
Carbon nanotube field effect transistors - fabrication, device physics, and circuit implications
Author
Wong, H.-S.P. ; Appenzeller, J. ; Derycke, V. ; Martel, R. ; Wind, S. ; Avouris, P.
Author_Institution
IBM Res., IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
fYear
2003
fDate
13-13 Feb. 2003
Firstpage
370
Abstract
The device and circuit implications of carbon nanotube field effect transistors (CNFET) as a logic technology are assessed. The salient device characteristics and fabrication techniques are described based on measured device parameters. The device/circuit performance of CNFET are estimated and the key technical challenges to developing the CNFET as a logic technology are discussed.
Keywords
carbon nanotubes; field effect logic circuits; field effect transistors; nanotube devices; C; carbon nanotube field effect transistors; circuit implications; device implications; device physics; fabrication techniques; logic technology; CNTFETs; Carbon nanotubes; Circuits; Contact resistance; Current measurement; Dielectrics; FETs; Fabrication; Physics; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference, 2003. Digest of Technical Papers. ISSCC. 2003 IEEE International
Conference_Location
San Francisco, CA, USA
ISSN
0193-6530
Print_ISBN
0-7803-7707-9
Type
conf
DOI
10.1109/ISSCC.2003.1234339
Filename
1234339
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