DocumentCode
2107687
Title
Beam steering system using a 2D MEMS scanner
Author
Pétremand, Yves ; Epitaux, Marc ; Hauffe, Ralf ; Noell, Wilfried ; De Rooij, Nico F.
Author_Institution
IMT, University of Neuchâtel, Rue Jaquet-Droz 1, 2000 Neuchâtel, Switzerland, phone +41327205153, fax +41327205711, yves.petremand@unine.ch
fYear
2007
fDate
21-25 Oct. 2007
Firstpage
916
Lastpage
917
Keywords
Assembly systems; Beam steering; Diode lasers; Lenses; Microelectromechanical devices; Micromechanical devices; Optical beams; Optical coupling; Optical fiber devices; Optical fibers; Beam Steering; Deep Reactive Ion Etching; Electrostatic Comb Drive; Laser to Fiber Coupling; Optical MEMS;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location
Lake Buena Vista, FL, USA
ISSN
1092-8081
Print_ISBN
978-1-4244-0925-9
Electronic_ISBN
1092-8081
Type
conf
DOI
10.1109/LEOS.2007.4382708
Filename
4382708
Link To Document