Design and optimization of micromachined flexible joints

Author

Fettig, H. ; Hubbard, T. ; Kujath, M.

Author_Institution

Mech. Eng. Dept., Dalhousie Univ., Halifax, NS, Canada

Volume

2

fYear

2000

fDate

2000

Firstpage

956

Abstract

This paper examines the design and optimization of surface micromachined flexible joints. The joints consist of slender beams that are formed in a variety of shapes: “I”, “H” and “X” shaped joints are considered. FEM simulations are used to examine these joints to determine the optimum design for a range of requirements: directional stiffnesses, range of motion and resonant frequency of a joint-mass system. The simulation results are compared to a series of tests of surface micromachined polysilicon micro-joints. The resonant frequencies of the joint-mass systems were measured using a non-contact laser reflectance setup

Keywords

artificial limbs; digital simulation; finite element analysis; frequency measurement; micromachining; optimisation; resonance; FEM simulations; H shaped joints; I shaped joints; X shaped joints; directional stiffnesses; joint-mass system; micromachined flexible joints design; micromachined flexible joints optimization; motion range; noncontact laser reflectance setup; optimum design; resonant frequency measurement; simulation results; slender beams; surface micromachined polysilicon micro-joints; Arm; Design optimization; Fabrication; Frequency measurement; Friction; Mechanical engineering; Micromachining; Resonant frequency; Shape; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical and Computer Engineering, 2000 Canadian Conference on

Conference_Location

Halifax, NS

ISSN

0840-7789

Print_ISBN

0-7803-5957-7

Type

conf

DOI

10.1109/CCECE.2000.849607

Filename

849607