Title :
Portable MEMS power sources
Author_Institution :
Microsystems Technol. Lab., MIT, Cambridge, MA, USA
Abstract :
Two devices are described that realize MEMS-based power sources as alternatives to batteries. The first is thermoelectric which utilizes a SiGe thermopile on a silicon nitride membrane. The device generates power at 500/spl deg/C. The second device is an engine that consists of a high-speed rotating silicon turbine.
Keywords :
engines; micromechanical devices; thermoelectric conversion; thermopiles; turbines; 500 degC; Si; SiGe; SiGe thermopile; SiN; high-speed rotating silicon turbine engine; portable MEMS power source; silicon nitride membrane; thermoelectric device; Batteries; Biomembranes; Chemical technology; Combustion; Fuels; Micromechanical devices; Power generation; Tellurium; Temperature; Transistors;
Conference_Titel :
Solid-State Circuits Conference, 2003. Digest of Technical Papers. ISSCC. 2003 IEEE International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-7707-9
DOI :
10.1109/ISSCC.2003.1234352
