Title :
Si Nano-Photodiode with a Surface-Plasmon Antenna for SiON Waveguide-Integrated Structure
Author :
Fujikata, Junichi ; Ushida, Jun ; Okamoto, Daisuke ; Gomyo, Akiko ; Nishi, Kenichi ; Tsuchizawa, Tai ; Watanabe, Toshifumi ; Yamada, Koji ; Itabashi, Seiichi ; Ohashi, Keishi
Author_Institution :
MIRAI-Selete, Tsukuba
Abstract :
We developed a Si nano-photodiode with a surface plasmon (SP) antenna for a SiON waveguide-integrated structure. We showed that interfacial periodic nano-scale metal-semiconductor-metal Schottky electrodes function as an SP optical antenna and also as an optical coupler between a SiON waveguide and a very thin Si-absorption layer.
Keywords :
Schottky diodes; integrated optics; metal-semiconductor-metal structures; optical couplers; photodiodes; surface plasmons; waveguides; Si; SiON; metal-semiconductor-metal Schottky electrode; nanophotodiode; optical coupler; surface plasmon antenna; waveguide-integrated structure; CMOS technology; Electrodes; Electromagnetic waveguides; Large scale integration; Optical coupling; Optical refraction; Optical surface waves; Optical variables control; Optical waveguides; Surface waves;
Conference_Titel :
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location :
Lake Buena Vista, FL
Print_ISBN :
978-1-4244-0925-9
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2007.4382715
