DocumentCode
2107923
Title
Si Nano-Photodiode with a Surface-Plasmon Antenna for SiON Waveguide-Integrated Structure
Author
Fujikata, Junichi ; Ushida, Jun ; Okamoto, Daisuke ; Gomyo, Akiko ; Nishi, Kenichi ; Tsuchizawa, Tai ; Watanabe, Toshifumi ; Yamada, Koji ; Itabashi, Seiichi ; Ohashi, Keishi
Author_Institution
MIRAI-Selete, Tsukuba
fYear
2007
fDate
21-25 Oct. 2007
Firstpage
929
Lastpage
930
Abstract
We developed a Si nano-photodiode with a surface plasmon (SP) antenna for a SiON waveguide-integrated structure. We showed that interfacial periodic nano-scale metal-semiconductor-metal Schottky electrodes function as an SP optical antenna and also as an optical coupler between a SiON waveguide and a very thin Si-absorption layer.
Keywords
Schottky diodes; integrated optics; metal-semiconductor-metal structures; optical couplers; photodiodes; surface plasmons; waveguides; Si; SiON; metal-semiconductor-metal Schottky electrode; nanophotodiode; optical coupler; surface plasmon antenna; waveguide-integrated structure; CMOS technology; Electrodes; Electromagnetic waveguides; Large scale integration; Optical coupling; Optical refraction; Optical surface waves; Optical variables control; Optical waveguides; Surface waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location
Lake Buena Vista, FL
ISSN
1092-8081
Print_ISBN
978-1-4244-0925-9
Electronic_ISBN
1092-8081
Type
conf
DOI
10.1109/LEOS.2007.4382715
Filename
4382715
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