DocumentCode
2107953
Title
A System For 3 D Simulations Of Complex Si And Heterostructure Devices
Author
Conti, Paolo ; Tomizawa, Masaaki ; Yoshii, Akira
Author_Institution
NTT LSI Laboratories
fYear
1993
fDate
14-15 May 1993
Firstpage
14
Lastpage
15
Keywords
Assembly; Capacitance; Computational modeling; Geometry; Large scale integration; MOSFET circuits; Mesh generation; Poisson equations; Solid modeling; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Process and Device Modeling, 1993. (1993 VPAD) 1993 International Workshop on
Print_ISBN
0-7803-1338-0
Type
conf
DOI
10.1109/VPAD.1993.724703
Filename
724703
Link To Document