• DocumentCode
    2108054
  • Title

    Design of experiments using a physical model

  • Author

    Atherton, John S. ; Snowden, Christopher M. ; Pollard, Roger D.

  • Author_Institution
    Microwave and Terahertz Technology, Group, Department of Electronic and Electrical Engineering, University of Leeds, Leeds. United Kingdom.
  • Volume
    2
  • fYear
    1995
  • fDate
    4-4 Sept. 1995
  • Firstpage
    1017
  • Lastpage
    1022
  • Abstract
    This paper describes the use of the Design of Experiments (DOE) technique with an accurate and efficient physical model. This approach allows for the systematic study of the effects of device geometry and process variations on electrical performance and demonstrates efficiently which parameters have the largest effect on device performane as well as showing any significant interaction between the effects. The model is used to show the variation in performance for a double recessed device.
  • Keywords
    Circuit simulation; FETs; Frequency; Geometry; Scattering parameters; Semiconductor device modeling; Semiconductor process modeling; Solid modeling; Table lookup; Time domain analysis;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 1995. 25th European
  • Conference_Location
    Bologna, Italy
  • Type

    conf

  • DOI
    10.1109/EUMA.1995.337116
  • Filename
    4137330