Design of cantilever-type microwave micromachined switches

Author

Lai, Yeong-Lin ; Tu, Ching-Hsiang

Author_Institution

Dept. of Mechatronics Eng., Nat. Changhua Univ. of Educ., Taiwan

fYear

2003

fDate

12-14 Aug. 2003

Firstpage

63

Lastpage

66

Abstract

This paper presents the mechatronic design of cantilever-type microwave micromachined switches. The complete mechatronic design is carried out by both mechanical and electromagnetic schemes. The mechanical characteristics of the cantilever-type shunt switches are investigated by an analytical method and a finite element method. The electromagnetic characteristics of the switches are studied by full-wave electromagnetic simulation. A mechatronic methodology is developed to design cantilever-type switches for communication applications.

Keywords

computational electromagnetics; electrostatic actuators; finite element analysis; microswitches; microwave switches; 0.1 to 40 GHz; cantilever-type microwave micromachined switches; communication applications; electrostatically operated switch; finite element method; full-wave electromagnetic simulation; shunt switches; Communication switching; Coplanar waveguides; Electrodes; Electrostatics; Finite element methods; Mechatronics; Microwave communication; Microwave technology; Structural beams; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Applied Electromagnetics, 2003. APACE 2003. Asia-Pacific Conference on

Print_ISBN

0-7803-8129-7

Type

conf

DOI

10.1109/APACE.2003.1234469

Filename

1234469