Title :
Design of cantilever-type microwave micromachined switches
Author :
Lai, Yeong-Lin ; Tu, Ching-Hsiang
Author_Institution :
Dept. of Mechatronics Eng., Nat. Changhua Univ. of Educ., Taiwan
Abstract :
This paper presents the mechatronic design of cantilever-type microwave micromachined switches. The complete mechatronic design is carried out by both mechanical and electromagnetic schemes. The mechanical characteristics of the cantilever-type shunt switches are investigated by an analytical method and a finite element method. The electromagnetic characteristics of the switches are studied by full-wave electromagnetic simulation. A mechatronic methodology is developed to design cantilever-type switches for communication applications.
Keywords :
computational electromagnetics; electrostatic actuators; finite element analysis; microswitches; microwave switches; 0.1 to 40 GHz; cantilever-type microwave micromachined switches; communication applications; electrostatically operated switch; finite element method; full-wave electromagnetic simulation; shunt switches; Communication switching; Coplanar waveguides; Electrodes; Electrostatics; Finite element methods; Mechatronics; Microwave communication; Microwave technology; Structural beams; Switches;
Conference_Titel :
Applied Electromagnetics, 2003. APACE 2003. Asia-Pacific Conference on
Print_ISBN :
0-7803-8129-7
DOI :
10.1109/APACE.2003.1234469
