• DocumentCode
    2109371
  • Title

    Characterisation of probe-tip/sample signal transmission in electrical sampling scanning force microscopy

  • Author

    Böhm, C. ; Sprengepiel, J. ; Leyk, A. ; Kubalek, E.

  • Author_Institution
    Gerhard-Mercator-Universitÿt-GH-Duisburg, Fachgebiet Werkstoffe der Elektrotechnik, BismarckstraÃ\x9fe 81, 47048 Duisburg, Germany
  • Volume
    2
  • fYear
    1995
  • fDate
    4-4 Sept. 1995
  • Firstpage
    1265
  • Lastpage
    1269
  • Abstract
    A scanning force microscope test system has been used in former work for MMIC charactersation up to 40 GHz. The local probe-tip/sample interaction is known but the transmission of high frequency sampling signals can cause unknown disturbances on the sample. Therefore for the first time systematic investigations of the probe-tip/sample interaction for various parameters are made. The results allow a closer understanding of the probe-tip behaviour and show possible ways for improved probe-tip geometries.
  • Keywords
    Electric variables measurement; Failure analysis; Force measurement; Frequency; Gallium arsenide; MMICs; Microscopy; Sampling methods; System testing; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 1995. 25th European
  • Conference_Location
    Bologna, Italy
  • Type

    conf

  • DOI
    10.1109/EUMA.1995.337168
  • Filename
    4137382
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2109371