Title :
Characterisation of probe-tip/sample signal transmission in electrical sampling scanning force microscopy
Author :
Böhm, C. ; Sprengepiel, J. ; Leyk, A. ; Kubalek, E.
Author_Institution :
Gerhard-Mercator-Universitÿt-GH-Duisburg, Fachgebiet Werkstoffe der Elektrotechnik, BismarckstraÃ\x9fe 81, 47048 Duisburg, Germany
Abstract :
A scanning force microscope test system has been used in former work for MMIC charactersation up to 40 GHz. The local probe-tip/sample interaction is known but the transmission of high frequency sampling signals can cause unknown disturbances on the sample. Therefore for the first time systematic investigations of the probe-tip/sample interaction for various parameters are made. The results allow a closer understanding of the probe-tip behaviour and show possible ways for improved probe-tip geometries.
Keywords :
Electric variables measurement; Failure analysis; Force measurement; Frequency; Gallium arsenide; MMICs; Microscopy; Sampling methods; System testing; Voltage measurement;
Conference_Titel :
Microwave Conference, 1995. 25th European
Conference_Location :
Bologna, Italy
DOI :
10.1109/EUMA.1995.337168