Title :
Design of a cloverleaf antenna for an antenna coupled bolometer for room temperature THz imaging
Author :
Klein, Bernhard ; Hahnel, R. ; Plettemeier, Dirk ; Morf, Thomas ; Despont, Michel ; Drechsler, U. ; Kuhn, Michael ; Toifl, Thomas ; Corcos, Dan ; Kaminski, N. ; Elad, Danny
Author_Institution :
RF Eng., Dresden Univ. of Technol., Dresden, Germany
Abstract :
THz-imaging enables promising applications in the medical and security domain, such as detectors for skin cancer or full-body scanners. These new possibilities arise the need for detectors in the THz frequency range. An antenna-coupled bolometer approach in a standard CMOS-SOI process, followed by a MEMS post CMOS process, is suggested to fabricate such a detector. Therefore, in this paper a cloverleaf shaped antenna design for the frequency range 0.5 THz to 1.5 THz is presented. Several design steps are shown together with measurement results regarding the influence of the MEMS process.
Keywords :
CMOS image sensors; antennas; bolometers; microfabrication; microsensors; silicon-on-insulator; terahertz wave detectors; terahertz wave imaging; CMOS-SOI process; MEMS post CMOS process; THz detector; antenna coupled bolometer; cloverleaf antenna design; frequency 0.5 THz to 1.5 THz; medical domain; microfabrication; room temperature THz imaging; security domain; Antenna measurements; Bolometers; Imaging; Micromechanical devices; Reflector antennas; Transistors; Bolometers; Micromachining; On-chip antennas; THz-imaging;
Conference_Titel :
Semiconductor Conference Dresden-Grenoble (ISCDG), 2013 International
Conference_Location :
Dresden
Print_ISBN :
978-1-4799-1250-6
DOI :
10.1109/ISCDG.2013.6656309
