Design of a cloverleaf antenna for an antenna coupled bolometer for room temperature THz imaging

Author

Klein, Bernhard ; Hahnel, R. ; Plettemeier, Dirk ; Morf, Thomas ; Despont, Michel ; Drechsler, U. ; Kuhn, Michael ; Toifl, Thomas ; Corcos, Dan ; Kaminski, N. ; Elad, Danny

Author_Institution

RF Eng., Dresden Univ. of Technol., Dresden, Germany

fYear

2013

fDate

26-27 Sept. 2013

Firstpage

1

Lastpage

4

Abstract

THz-imaging enables promising applications in the medical and security domain, such as detectors for skin cancer or full-body scanners. These new possibilities arise the need for detectors in the THz frequency range. An antenna-coupled bolometer approach in a standard CMOS-SOI process, followed by a MEMS post CMOS process, is suggested to fabricate such a detector. Therefore, in this paper a cloverleaf shaped antenna design for the frequency range 0.5 THz to 1.5 THz is presented. Several design steps are shown together with measurement results regarding the influence of the MEMS process.

Keywords

CMOS image sensors; antennas; bolometers; microfabrication; microsensors; silicon-on-insulator; terahertz wave detectors; terahertz wave imaging; CMOS-SOI process; MEMS post CMOS process; THz detector; antenna coupled bolometer; cloverleaf antenna design; frequency 0.5 THz to 1.5 THz; medical domain; microfabrication; room temperature THz imaging; security domain; Antenna measurements; Bolometers; Imaging; Micromechanical devices; Reflector antennas; Transistors; Bolometers; Micromachining; On-chip antennas; THz-imaging;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference Dresden-Grenoble (ISCDG), 2013 International

Conference_Location

Dresden

Print_ISBN

978-1-4799-1250-6

Type

conf

DOI

10.1109/ISCDG.2013.6656309

Filename

6656309