Resistive switching in thermally oxidized titanium films

Author

Blaschke, Daniel ; Zahn, Peter ; Skorupa, Ilona ; Scheumann, Bernd ; Scholz, Andrea ; Gemming, Sibylle ; Potzger, Kay

Author_Institution

Inst. of Ion-Beam Phys. & Mater. Res., Helmholtz-Zentrum Dresden - Rossendorf, Dresden, Germany

fYear

2013

fDate

26-27 Sept. 2013

Firstpage

1

Lastpage

4

Abstract

Polycrystalline rutile TiO₂ thin films were prepared on Pt/Ti/SiO₂/Si substrates by thermal oxidation of a 100nm thick titanium film at temperatures between 500°C and 800°C. We observed stable nonvolatile unipolar switching in the films oxidized at 600°C to 800°C. Retention measurements showed stable ON and OFF states for a time of at least 24h at room temperature, if there was a sufficient relaxation period between the switching event and the start of the read out process. Without any appropriate time, we observed an increase in resistance in the high resistance state (HRS) after the RESET process. In contrast, the low resistance state (LRS) did not show a time dependent resistance change after the SET process.

Keywords

electric resistance; electrical conductivity transitions; electrical resistivity; oxidation; thin films; titanium compounds; Pt-Ti-SiO₂-Si; Pt-Ti-silica-Si substrates; RESET process; Si; TiO₂; high resistance state; low resistance state; polycrystalline rutile titania thin films; read out process; relaxation period; resistive switching; retention measurements; size 100 nm; stable OFF state; stable ON state; stable nonvolatile unipolar switching; switching event; temperature 500 degC to 800 degC; thermal oxidation; thermally oxidized titanium films; time dependent resistance change; Films; Gold; Optical switches; Oxidation; Resistance; Temperature measurement; TiO2; resistive switching; thermal oxidation retention;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference Dresden-Grenoble (ISCDG), 2013 International

Conference_Location

Dresden

Print_ISBN

978-1-4799-1250-6

Type

conf

DOI

10.1109/ISCDG.2013.6656318

Filename

6656318