DocumentCode :
2110371
Title :
Mechanical Stress Design System For Semiconductor Devices
Author :
Miura, Hideo ; Saito, Naoto ; Ohta, Hiroyuki ; Okamoto, Noriaki ; Masuda, Hiroo
Author_Institution :
Hitachi, Ltd.
fYear :
1993
fDate :
14-15 May 1993
Firstpage :
60
Lastpage :
63
Keywords :
Oxidation; Residual stresses; Semiconductor devices; Semiconductor films; Semiconductor thin films; Silicon; Substrates; Tensile stress; Thermal expansion; Thermal stresses;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Process and Device Modeling, 1993. (1993 VPAD) 1993 International Workshop on
Print_ISBN :
0-7803-1338-0
Type :
conf
DOI :
10.1109/VPAD.1993.724723
Filename :
724723
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2110371
