Title :
Impact of layout on the performance of photodiodes in 0.18µm CMOS SOI
Author :
Xuebei Yang ; Xuyang Lu ; Babakhani, A.
Author_Institution :
Electr. & Comput. Eng. Dept., Rice Univ., Houston, TX, USA
Abstract :
The impact of layout on the responsivity and bandwidth of photodiodes is studied and summarized. The photodiodes are fabricated in a 0.18μm CMOS SOI process technology. The measurements are performed at wavelengths near 850nm.
Keywords :
CMOS integrated circuits; integrated circuit layout; integrated optoelectronics; photodiodes; silicon-on-insulator; CMOS SOI; layout impact; photodiode performance; silicon-on-insulator; size 0.18 mum; Bandwidth; CMOS integrated circuits; CMOS technology; Fingers; Layout; Metals; Photodiodes;
Conference_Titel :
Photonics Conference (IPC), 2013 IEEE
Conference_Location :
Bellevue, WA
Print_ISBN :
978-1-4577-1506-8
DOI :
10.1109/IPCon.2013.6656430
