Electric monorail system with magnetic levitations and linear induction motors for contactless delivery applications

In recent semiconductor and display manufacturing processes, high clean-class delivery operation is required more and more for short working time and better product quality. Traditionally single-sided linear induction motor (SLIM) is widely used in the liner drive applications because of its simplicity in the rail structure. A magnetically levitated (Maglev) unmanned vehicle with SLIM traction, which is powered by a contactless power supply (CPS) can be a high precision delivery solution for this industry. In this paper unmanned carrier vehicle, which can levitate without contacting the rail structure, is suggested for high clean-class FPD delivery applications. It can be more acceptable for the complex facilities composed with many processes which require longer rails, because of simple rail structure. The test setup consists of a test vehicle and a rounded rail, in which the vehicle can load and unload products at arbitrary position commanded through wireless communications of host computer. The experimental results show that the suggested carrier vehicle has traction servos and robust electromagnetic suspensions without any contact. This type of automated delivery vehicle is expected to have significant role in the high clean-class delivery applications.