Title :
Engineering the optical constants of sputtered amorphous silicon films by crystallization with rapid thermal annealing
Author :
Amin, Md Syedul ; Hozhabri, Nader ; Magnusson, Robert
Author_Institution :
Dept. of Electr. Eng., Univ. of Texas at Arlington, Arlington, TX, USA
Abstract :
We engineer the complex refractive index n+ik of sputtered amorphous silicon by rapid thermal annealing. An order-of-magnitude reduction of the extinction coefficient k is achieved.
Keywords :
amorphous semiconductors; crystallisation; elemental semiconductors; extinction coefficients; rapid thermal annealing; refractive index; semiconductor thin films; silicon; sputtered coatings; Si; complex refractive index; crystallization; extinction coefficient; optical constants; order-of-magnitude reduction; rapid thermal annealing; sputtered amorphous silicon films; Annealing; Optical films; Optical refraction; Optical variables control; Refractive index; Silicon;
Conference_Titel :
Photonics Conference (IPC), 2013 IEEE
Conference_Location :
Bellevue, WA
Print_ISBN :
978-1-4577-1506-8
DOI :
10.1109/IPCon.2013.6656457
