DocumentCode
2113460
Title
Effects Of Nitride Viscosity On The Stress Distribution In LOCOS Structure
Author
Kuroda, S. ; Okihara, M. ; Hirashita, N. ; Nishi, K.
Author_Institution
OKI Electric Industry Co., Ltd.
fYear
1993
fDate
14-15 May 1993
Firstpage
90
Lastpage
91
Keywords
Compressive stress; Elasticity; Electron devices; Equations; Oxidation; Research and development; Shape; Silicon; Very large scale integration; Viscosity;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Process and Device Modeling, 1993. (1993 VPAD) 1993 International Workshop on
Print_ISBN
0-7803-1338-0
Type
conf
DOI
10.1109/VPAD.1993.724734
Filename
724734
Link To Document