Fabrication of electrically-pumped resonance-cavity membrane-reflector surface-emitters on silicon

Author

Wenjuan Fan ; Deyin Zhao ; Chuwongin, Santhad ; Jung-Hun Seo ; Hongjun Yang ; Berggren, Jesper ; Hammar, Mattias ; Zhenqiang Ma ; Weidong Zhou

Author_Institution

Dept. of Electr. Eng., Univ. of Texas at Arlington, Arlington, TX, USA

fYear

2013

fDate

8-12 Sept. 2013

Firstpage

643

Lastpage

644

Abstract

Various lasers and light sources on Si via heterogeneous integration of Si/III-V have been reported based on direct growth on Si or wafer bonding technology. We reported earlier optically-pumped Si membrane-reflector vertical-cavity surface-emitting lasers (MRVCSELs) fabricated by low-temperature membrane transfer printing processes. Here we report electrically-pumped devices based on an intra-cavity contact configuration.

Keywords

III-V semiconductors; elemental semiconductors; integrated optoelectronics; laser cavity resonators; optical elements; optical fabrication; optical pumping; printing; quantum well lasers; silicon; surface emitting lasers; wafer bonding; MR-VCSEL; Si; Si-III-V heterogeneous integration; electrically-pumped resonance-cavity membrane-reflector surface-emitters; intracavity contact configuration; light sources; low-temperature membrane transfer printing; optically-pumped membrane-reflector vertical-cavity surface-emitting lasers; wafer bonding; Cavity resonators; Current measurement; Silicon; Substrates; Temperature measurement; Vertical cavity surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Photonics Conference (IPC), 2013 IEEE

Conference_Location

Bellevue, WA

Print_ISBN

978-1-4577-1506-8

Type

conf

DOI

10.1109/IPCon.2013.6656459

Filename

6656459