Efficient Pre-stressed Harmonic Analysis of RF-Microresonators by Means of Model Order Reduction

A simulation methodology to reduce computational time of pre-stressed harmonic analysis of radio frequency (RF) microresonators is demonstrated. The methodology is based on the application of model order reduction to a system of ordinary differential equations obtained after spatial discretization by finite element software. Model order reduction produces a low dimensional approximation of the original system and hence enables a substantial reduction of simulation time while maintaining a very small approximation error. The approach allows performing rapid device design and optimization. Once the device design and working conditions have been defined its reduced model can also be used to implement a behavioural model that can be employed in system level simulations