Title :
Using ElectroMechanical Buckling for Measuring Residual Stress
Author :
Abu-Salih, Samy ; Elata, David
Author_Institution :
Fac. of Mech. Eng., Technion-Israel Inst. of Technol., Haifa
Abstract :
In this work, a new test structure and method for measuring residual stress is presented. The test structure is a single clamped-clamped beam with electrodes symmetrically positioned along both sides of the beam. The electromechanical buckling response is used to measure the residual stress. It is shown that a single test structure of the proposed design may be used to measure both compressive and tensile residual stresses in a continuous wide range
Keywords :
buckling; compressive strength; compressive testing; internal stresses; tensile strength; tensile testing; compressive residual stress; electromechanical buckling response; single clamped-clamped beam; tensile residual stress; Compressive stress; Distortion measurement; Electrodes; Electrostatic measurements; Mechanical variables measurement; Micromachining; Residual stresses; Stress measurement; Testing; Thermal stresses;
Conference_Titel :
Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2006. EuroSime 2006. 7th International Conference on
Conference_Location :
Como
Print_ISBN :
1-4244-0275-1
DOI :
10.1109/ESIME.2006.1643991
