DocumentCode
2114860
Title
Role of thermal stress in athermal waveguide design using TiO2 waveguides on a silicon substrate
Author
Bovington, J.T. ; Wu, R. ; Cheng, K.T. ; Bowers, John E.
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of California Santa Barbara, Santa Barbara, CA, USA
fYear
2013
fDate
8-12 Sept. 2013
Firstpage
219
Lastpage
220
Abstract
Experimental demonstrations of ring resonators with TiO2 cores are presented and measured with -2.9pm/K resonance shift. Their thermo-stress-optic behavior was found to be important to their function; therefore an inclusive model is presented and simulated numerically.
Keywords
elemental semiconductors; integrated optics; numerical analysis; optical design techniques; optical resonators; optical waveguides; silicon; thermal stresses; thermo-optical effects; titanium compounds; Si; TiO2-Si; athermal waveguide design; numerical simulation; resonance shift; ring resonators; silicon substrate; thermal stress; thermo-stress-optic behavior; Indexes; Mathematical model; Optical waveguides; Silicon; Stress; Temperature measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Photonics Conference (IPC), 2013 IEEE
Conference_Location
Bellevue, WA
Print_ISBN
978-1-4577-1506-8
Type
conf
DOI
10.1109/IPCon.2013.6656513
Filename
6656513
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