Dynamics of immersed clamped-clamped microresonators

Microand nanomechanical resonators are used in a variety of sensing applications. We investigate the dynamics of clamped-clamped micromechanical string resonators immersed in viscous fluids. The resonators are driven using a magneto motive technique and an optical lever is used to detect their motion. The resonance frequencies and Q-factors of the odd flexural resonance modes are determined up to the 9th mode. Using liquids with varying density and viscosity, the inertial and viscous effects are discriminated by measuring the resonance frequencies and Q-factors.