Title :
[Copyright notice]
Abstract :
The following topics are dealt with: solar cells; micromachines for surgery; RF recognition system and sensors; nanosized MOSFET; nanowire pn junction; tunnel transistors; flexible thin-film transistors; HFET; resistive memory; thin film capacitors; high-density plasma nitridation; vibratory piezoelectric cantilever sensors; magnetic area sensors; organic thin film transistors; CMOS integrated circuits; and on-chip robotics.
Keywords :
CMOS integrated circuits; MOSFET; bioMEMS; capacitors; digital storage; flexible electronics; nanoelectronics; nitridation; p-n junctions; piezoelectric devices; plasma materials processing; robots; sensors; solar cells; surgery; thin film transistors; tunnel transistors; CMOS integrated circuits; HFET; RF recognition system; flexible thin-film transistors; high-density plasma nitridation; magnetic area sensors; micromachines; nanosized MOSFET; nanowire pn junction; on-chip robotics; organic thin film transistors; resistive memory; solar cells; surgery; thin film capacitors; tunnel transistors; vibratory piezoelectric cantilever sensors;
Conference_Titel :
Future of Electron Devices, Kansai, (IMFEDK), 2011 International Meeting for
Conference_Location :
Osaka
Print_ISBN :
978-1-61284-145-8
DOI :
10.1109/IMFEDK.2011.5944816
