Modelling the stiffness and inertial characteristics of MEMS´supporting beams

Author

Braghin, F. ; Leo, E. ; Resta, F.

Author_Institution

Politecnico di Milano

fYear

2006

fDate

24-26 April 2006

Firstpage

1

Lastpage

8

Abstract

MEMS sensors usually work at frequencies well above 1kHz. At these frequencies, supporting beams do not only contribute to the elasticity of the system but also to its inertia. However, the supporting beams´ inertia is not equal to any modal mass since excitation frequency is not equal to any eigenfrequency of the supporting beams. Based on a FEA model of the supporting beams it is possible to determine this inertial contribution at any working frequency thus allowing to set up a simple lumped parameter model that correctly reproduces the dynamic behaviour of the device

Keywords

finite element analysis; microsensors; MEMS sensors; MEMS supporting beams; finite element analysis model; inertial characteristics; lumped parameter model; stiffness characteristics; Elasticity; Electrostatics; Fluid dynamics; Frequency; Gyroscopes; Mechanical sensors; Microelectromechanical devices; Micromechanical devices; Numerical models; Sensor phenomena and characterization;

fLanguage

English

Publisher

ieee

Conference_Titel

Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2006. EuroSime 2006. 7th International Conference on

Conference_Location

Como

Print_ISBN

1-4244-0275-1

Type

conf

DOI

10.1109/ESIME.2006.1644027

Filename

1644027