Title :
Topology optimization of electromechanical microsystems against pull-in voltage
Author :
Lemaire, Etienne ; Duysinx, Pierre ; Rochus, Véronique ; Golinval, Jean-Claude
Author_Institution :
Dept. of Mech. & Aerosp., Liege Univ.
Abstract :
The present work is dedicated to the application of topology optimization in the multiphysics field of MEMS. Precisely, it describes how it is possible to maximize pull-in voltage of an electromechanical microsystem for which the optimization domain is insulated from the electric field. The electromechanical coupling is modeled by the use of a monolithic analysis. The optimization task is completed with the help of a sequential convex linear approximation schemes (CONLIN)
Keywords :
convex programming; micromechanical devices; MEMS; electric field; electromechanical coupling; electromechanical microsystems; pull-in voltage; sequential convex linear approximation schemes; topology optimization; Capacitors; Design optimization; Electric potential; Electrodes; Equations; Micromechanical devices; Permittivity; Springs; Topology; Voltage;
Conference_Titel :
Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2006. EuroSime 2006. 7th International Conference on
Conference_Location :
Como
Print_ISBN :
1-4244-0275-1
DOI :
10.1109/ESIME.2006.1644038
