FEM modelling of Piezo-actuated Microswitches

Author

Chapuis, F. ; Bastien, F. ; Manceau, J.F. ; Casset, F. ; Charvet, P.L.

Author_Institution

Dept. of LPMO, Inst. FEMTO-ST, Besancon

fYear

2006

fDate

24-26 April 2006

Firstpage

1

Lastpage

6

Abstract

This article presents a study of microswitches with piezoelectric actuation. With the help of analysis modelling and FEM commercial software (ANSYS), we investigated the potentiality of AlN as piezoelectric actuator. Firstly, we compared AlN with PZT to actuate simple structures by bimorph effect as cantilever or clamped-clamped membrane. After this investigation, we focused on means to improve the deflection and the contact force of structures, by mechanical considerations, in case of an AlN actuation. This resulted in several designs of microswitches, with two different actuation mechanisms: bending or buckling. To go further, we evaluated some technological aspects as the influence of residual stresses and the shape of membrane on an AlN piezo-actuated structure

Keywords

aluminium compounds; cantilevers; finite element analysis; lead compounds; microswitches; piezoelectric actuators; titanium compounds; zirconium compounds; ANSYS; AlN; FEM commercial software; FEM modelling; PZT; Pb(ZrTi)O₃; bimorph effect; cantilever; clamped-clamped membrane; piezo-actuated microswitches; piezoelectric actuator; residual stresses; Acoustic devices; Biomembranes; Electrostatics; Microswitches; Piezoelectric actuators; Piezoelectric materials; Piezoelectric polarization; Residual stresses; Shape; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2006. EuroSime 2006. 7th International Conference on

Conference_Location

Como

Print_ISBN

1-4244-0275-1

Type

conf

DOI

10.1109/ESIME.2006.1644040

Filename

1644040