• DocumentCode
    2116361
  • Title

    Optimization with process limits and application requirements for force sensors

  • Author

    Park, Sung-Jin ; Doll, Joseph C. ; Harjee, Nahid ; Pruitt, Beth L.

  • Author_Institution
    Stanford Univ., Stanford, CA, USA
  • fYear
    2010
  • fDate
    1-4 Nov. 2010
  • Firstpage
    1946
  • Lastpage
    1949
  • Abstract
    Piezoresistive cantilevers are commonly used for force sensing. However, the design of piezoresistive cantilevers is complicated by coupling between many design parameters as well as design and operation constraints. Here, we discuss analytical models and optimization techniques for piezoresistive cantilevers.
  • Keywords
    force sensors; piezoresistive devices; application requirements; coupling; force sensors; piezoresistive cantilevers; process limits;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2010 IEEE
  • Conference_Location
    Kona, HI
  • ISSN
    1930-0395
  • Print_ISBN
    978-1-4244-8170-5
  • Electronic_ISBN
    1930-0395
  • Type

    conf

  • DOI
    10.1109/ICSENS.2010.5689978
  • Filename
    5689978
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2116361