EM Modeling of RF MEMS

The modeling of RF MEMS circuits and components is an important issue, as by proper modeling and optimization of a structure prior to the technological realization the time for a production cycle can be reduced. RF MEMS are in general three-dimensional structured devices, which can be analyzed with all common design and simulation tools. On the other hand the geometrical dimensions, varying from a fraction of a micron to several millimeters, create aspect ratios that make the accurate full wave characterization of the device very challenging. Moreover, for small dimensions material parameters like conductor loss, roughness etc. Play an important role and have to be considered in a careful analysis. In this contribution a short overview over existing modeling tools, suitable for the analysis of RF MEMS will be given. Modeling strategies and critical aspects of the simulations will be discussed