Title :
A Novel MEMS-based Nanoscale Material Testing System
Author :
Espinosa, Horacio D. ; Zhu, Yong ; Corigliano, Alberto
Author_Institution :
Northwestern Univ., Evanston, IL
Abstract :
This paper describes the design and operation of a novel MEMS-based material testing system used for tensile testing of nanostructures. The device consists of a thermal actuator and a capacitive load sensor with a specimen in between. The best load sensor resolutions were achieved reaching 0.05 fF in capacitance, 1 nm in displacement and 12 nN in load. The device performance was demonstrated by testing palladium nanowires
Keywords :
capacitive sensors; materials testing; microactuators; microsensors; nanowires; palladium alloys; temperature sensors; 0.05 fF; MEMS-based material testing system; Pd; capacitive load sensor; load sensor resolutions; nanoNewton resolution; nanoscale material testing system; nanostructures; palladium nanowires; specimen deformation; specimen fracture; sub-nanometer displacement accuracy; tensile testing; thermal actuator; Actuators; Capacitance; Capacitive sensors; Materials testing; Nanostructured materials; Nanostructures; Palladium; System testing; Thermal loading; Thermal sensors;
Conference_Titel :
Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2006. EuroSime 2006. 7th International Conference on
Conference_Location :
Como
Print_ISBN :
1-4244-0275-1
DOI :
10.1109/ESIME.2006.1644064
