Title :
Fabrication and axial sensitivity analysis of vibratory piezoelectric cantilever sensors for three-axis tactile sensing
Author :
Yang, Yi ; Yamashita, Kaoru ; Nishimoto, Takanori ; Furukawa, Kazuya ; Noda, Minoru
Author_Institution :
Grad. Sch. of Sci. & Technol., Kyoto Inst. of Technol., Kyoto, Japan
Abstract :
Vibratory piezoelectric cantilever sensors for triaxial tactile sensing have been fabricated and analyzed in axial sensitivity. Vector tactile measurement on a single sensor element is demonstrated by using resonant frequency shift in three vibration modes upon external load application.
Keywords :
cantilevers; piezoelectric devices; sensitivity analysis; tactile sensors; axial sensitivity analysis; fabrication sensitivity analysis; resonant frequency; three-axis tactile sensor; vector tactile measurement; vibration mode; vibratory piezoelectric cantilever sensor; Films; Finite element methods; Resonant frequency; Substrates; Tactile sensors; piezoelectric sensor; resonant frequency; vector tactile sensing; vibratory cantilever;
Conference_Titel :
Future of Electron Devices, Kansai, (IMFEDK), 2011 International Meeting for
Conference_Location :
Osaka
Print_ISBN :
978-1-61284-145-8
Electronic_ISBN :
978-1-61284-147-2
DOI :
10.1109/IMFEDK.2011.5944879
