Title :
Coplanar waveguide stub/filters on thin membranes and standard substrates
Author :
Iordanescu, Sergh ; Bartolucci, Giancaslo ; Simion, Stefan ; Dragoman, Mircea
Author_Institution :
Nat. Inst. for Res. & Dev. on Microtechnol., Bucharest, Romania
Abstract :
Several coplanar waveguide series stubs and filter structures based on such stubs were designed and manufactured on standard semiinsulating GaAs substrates and thin GaAs membranes as well as on silicon based thin dielectric membranes. Coplanar waveguide circuits realized on thin membranes offer significant advantages over conventional coplanar or microstrip lines for monolithic or hybrid MIC applications
Keywords :
III-V semiconductors; MMIC; coplanar waveguides; elemental semiconductors; gallium arsenide; hybrid integrated circuits; membranes; microwave filters; microwave integrated circuits; silicon; GaAs; Si; coplanar lines; coplanar waveguide circuits; coplanar waveguide series stubs; coplanar waveguide stub/filters; hybrid MIC applications; microstrip lines; monolithic MIC applications; silicon based thin dielectric membranes; standard semiinsulating GaAs substrates; substrates; thin GaAs membranes; thin membranes; Biomembranes; Circuits; Conductors; Coplanar waveguides; Dielectric substrates; Filters; Gallium arsenide; Impedance; Manufacturing; Microstrip;
Conference_Titel :
Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-3804-9
DOI :
10.1109/SMICND.1997.651184
