• DocumentCode
    2117699
  • Title

    Accurate post-fabrication trimming of ultra-compact resonators on silicon

  • Author

    Atabaki, Amir H. ; Eftekhar, Ali Asghar ; Askari, M. ; Adibi, Ali

  • Author_Institution
    Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
  • fYear
    2013
  • fDate
    8-12 Sept. 2013
  • Firstpage
    428
  • Lastpage
    429
  • Abstract
    We experimentally demonstrate an accurate post-fabrication trimming technique for the correction of the optical phase of silicon photonic devices using a single fabrication step. Using this technique, we reduce the random resonance wavelength variation of ultra-compact silicon resonators by a factor of 6 to below 50 pm.
  • Keywords
    elemental semiconductors; integrated optics; optical fabrication; optical resonators; silicon; Si; accurate post-fabrication trimming; random resonance wavelength variation; silicon photonic devices; ultracompact resonators; Arrays; Films; Optical resonators; Photonics; Silicon; Silicon compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photonics Conference (IPC), 2013 IEEE
  • Conference_Location
    Bellevue, WA
  • Print_ISBN
    978-1-4577-1506-8
  • Type

    conf

  • DOI
    10.1109/IPCon.2013.6656620
  • Filename
    6656620
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2117699