• DocumentCode
    2118003
  • Title

    High Q silicon photonic crystal cavities for functional cladding materials

  • Author

    Prorok, Stefan ; Petrov, A.Yu. ; Eich, M. ; Jingdong Luo ; Jen, Alex K.

  • Author_Institution
    Inst. for Opt. & Electron. Mater., Hamburg Univ. of Technol., Hamburg, Germany
  • fYear
    2013
  • fDate
    8-12 Sept. 2013
  • Firstpage
    450
  • Lastpage
    451
  • Abstract
    We demonstrate a novel method to define high Q silicon photonic crystal cavities with functional polymer cladding with ultra precision using spatially resolved electron beam bleaching of a chromophore doped polymer.
  • Keywords
    Q-factor; bleaching (materials processing); cladding techniques; electron beam effects; elemental semiconductors; integrated optics; optical fabrication; optical polymers; optical waveguides; photonic crystals; silicon; Si; chromophore doped polymer; functional cladding materials; high Q silicon photonic crystal cavities; spatially resolved electron beam bleaching; Bleaching; Cavity resonators; Lattices; Photonic crystals; Polymers; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photonics Conference (IPC), 2013 IEEE
  • Conference_Location
    Bellevue, WA
  • Print_ISBN
    978-1-4577-1506-8
  • Type

    conf

  • DOI
    10.1109/IPCon.2013.6656631
  • Filename
    6656631
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2118003