Title :
Solid Modeling-based Parametric Operations For Device Design
Author :
Wong, William T. ; Yang, Dan X. ; Dutton, Robert W. ; Plummer, James D.
Author_Institution :
Stanford University
Keywords :
Algorithm design and analysis; Analytical models; Computational modeling; Epitaxial growth; Noise figure; Noise reduction; Semiconductor device noise; Semiconductor process modeling; Solid modeling; Substrates;
Conference_Titel :
VLSI Process and Device Modeling, 1993. (1993 VPAD) 1993 International Workshop on
Print_ISBN :
0-7803-1338-0
DOI :
10.1109/VPAD.1993.724757