Title :
Low Temperature Plasma Deposition of Silicon Thin Films for Flexible Electronics
Author :
Cabarrocas, P. Roca i
Author_Institution :
LPICM, Ecole Polytechnique, 91128 Palaiseau, France. pere.roca@polytechnique.edu
Keywords :
Flexible electronics; Hydrogen; Photovoltaic cells; Plasma applications; Plasma sources; Plasma temperature; Semiconductor thin films; Silicon; Sputtering; Substrates;
Conference_Titel :
Advanced Thermal Processing of Semiconductors, 2007. RTP 2007. 15th International Conference on
Conference_Location :
Cannizzaro, Catania, Italy
Print_ISBN :
978-1-4244-1228-0
Electronic_ISBN :
978-1-4244-1228-0
DOI :
10.1109/RTP.2007.4383810
