DocumentCode :
2119960
Title :
Nano-scaled electrical sensor devices for integrated circuit diagnostics
Author :
Wright, R.G. ; Kirkland, Larry V.
Author_Institution :
GMA Industries, Inc.
Volume :
6
fYear :
2003
fDate :
March 8-15, 2003
Keywords :
Automatic test equipment; Automatic testing; Chemical sensors; Circuit testing; Copper; Integrated circuit interconnections; Integrated circuit testing; Nanoscale devices; Printed circuits; Test equipment;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Aerospace Conference, 2003. Proceedings. 2003 IEEE
ISSN :
1095-323X
Print_ISBN :
0-7803-7651-X
Type :
conf
DOI :
10.1109/AERO.2003.1235181
Filename :
1235181
Link To Document :
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