Title :
Nano-scaled electrical sensor devices for integrated circuit diagnostics
Author :
Wright, R.G. ; Kirkland, Larry V.
Author_Institution :
GMA Industries, Inc.
Keywords :
Automatic test equipment; Automatic testing; Chemical sensors; Circuit testing; Copper; Integrated circuit interconnections; Integrated circuit testing; Nanoscale devices; Printed circuits; Test equipment;
Conference_Titel :
Aerospace Conference, 2003. Proceedings. 2003 IEEE
Print_ISBN :
0-7803-7651-X
DOI :
10.1109/AERO.2003.1235181