Title :
Role of Temperature on the Morphology and the Chemical Composition of C-based Nanostructures: From Nanocolumns to Nanotubes
Author :
Scalese, S. ; Scuderi, V. ; Simone, F. ; Pennisi, A. ; Compagnini, G. ; Privitera, V.
Author_Institution :
CNR-IMM, Catania
Abstract :
In this work we report the growth of C-based nanostructures by means of radio-frequency (RF) magnetron sputtering at different temperatures. We found that the deposition temperature has a huge influence on the structure and chemical composition of the C-based materials obtained. In the temperature range 400degC-600degC we obtain nanocolumns made of carbon and nitrogen (CNx), due to the incorporation of the sputtering gas, whilst at a deposition temperature of 700degC the formation of carbon nanotubes (CNT) takes place. The effect of thermal processes on the morphology and the chemical composition of the grown C nanostructures has been investigated by scanning electron microscopy, transmission electron microscopy and Raman spectroscopy
Keywords :
Raman spectra; carbon; chemical analysis; nanostructured materials; scanning electron microscopy; sputter deposition; transmission electron microscopy; C; C - Element; C-based nanostructures; Raman Spectroscopy; Scanning Electron Microscopy; Transmission Electron microscopy; chemical composition; deposition temperature; nanocolumns; nanotubes; radio-frequency magnetron sputtering; structure composition; Carbon nanotubes; Chemicals; Composite materials; Morphology; Nanostructures; Radio frequency; Scanning electron microscopy; Sputtering; Temperature distribution; Transmission electron microscopy;
Conference_Titel :
Advanced Thermal Processing of Semiconductors, 2007. RTP 2007. 15th International Conference on
Conference_Location :
Catania, Sicily
Print_ISBN :
978-1-4244-1228-0
Electronic_ISBN :
978-1-4244-1228-0
DOI :
10.1109/RTP.2007.4383830
